Information on SIMS raster size parameter
The raster size setting determines the size of the sputtered area on the
target; that is the area, from which surface ions can be collected. It is
a combination of a range selector and a potentiometer setting value. A
range of 250 micrometers and a setting of 7 results in a raster size of
250 micrometers multiplied by 7/10, 175 micrometers. Maximum value for
the setting is 10.
The raster size setting is mainly stored for archival purposes. It
should, however, always be verified that it is larger than the image field size. See an example of an analysis that
was done with raster size 350 micrometers and image field size 400
micrometers due to the feature's size.
Note the edge effect on the carbon signal to the left and bottom of this ion
image.
Klaus G. Paul, 4-30-1994