Information on SIMS Image Field Settings

Two settings determine the feature's image size, i.e. the size of the analyzed area and the mass resolution of the SIMS instrument: The following combinations are possible:
+--------------------------------------------------------+
|                     Transfer Optics Setting            |
|-------------------+------------+-----------+-----------|
| Field Aperture    | 25 mum*)   | 150 mum*) | 400 mum*) |
|-------------------+------------+-----------+-----------|
| 1 (1800 mum*))    | 25 mum*)   + 150 mum*) | 400 mum*) |
|-------------------+------------+-----------+-----------|
| 2 (750 mum*))     | 10 mum*)   +  60 mum*) | 170 mum*) |
|-------------------+------------+-----------+-----------|
| 3 (100 mum*))     |not used during these investigations|
+--------------------------------------------------------+
 *) mum stands for micrometers
If a Field Aperture of 1 was used for analyses, for example due to a large feature size, the mass resolution was definitely less than m/Dm = 3000! Use extreme care when interpreting these analyses as the standard mass interference annotations are made for mass resolutions of m/dm = 3000.

The image size value is also explicitly given in the Analytical Conditions section of each data sheet. Additionaly, a 50 micrometer scale bar is available on the images. If either the Field Aperture or the Transfer Optical value was not available, no image size is given in the archive.

In this case, you may try to deduce the value by looking at the feature size information, given in the Impact feature information section of the SIMS data sheets and looking at images of the surface material (e.g., Al, Si and Ca for MOS detectors).



Klaus G. Paul, 6-8-1994